The development state of affairs of superprecision and influence surface quality the analysis of a certain number of elements

10.

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005 ≤ 0.

It is current that 005 exceed accurate production technology one of core technologies that each industrial countries develop, advanced country is in each technology hi-tech domain (wait like industry of national defence industry, integrated circuit, IT) precede all the time, with these countries height takes seriously and development exceeds accurate production technology to have all in all concern. Exceeding accurate production technology is as the progress that measures a technology development. The company such as Renishaw, Heidenhain and SONY grew what resolution all can achieve 1nm to measure component; The measurement of the American HP company, company such as Zygo of British Taylor, United States the requirement that the instrument all can satisfy accept rice to measure. Exceed accurate production technology to had gotten applied extensively in the world. The uses like orbiter attitude bearing that concerns with national defence industry and telemetering component, Ha Bo that is sent aerospace is telescopic (lamina of rotor of engine of HST) , aircraft; With integrated circuit (the silicon chip that IC) concerns is machined (Ra is less than the treatment surface surface roughness of requirement silicon chip commonly 2nm, top demand is amounted to 0. 1nm) ; In addition photoetching equipment and the precision requirement that silicon chip machines equipment arrive inferior micron and accept rice class. Missile is the precision of inertial appearance, precision of the planar illuminator of laser gyroscope, infra-red the missile illuminator of control and guide, its surface surface roughness all asks to reach accept rice level. Additional, requirement of production precision of form of face of spare parts of the optical curved surface that be not a ball already amounted to λ / (30, 50) , ≤ of requirement of exterior surface roughness 0. 5nm. 1, development of American UnioCarbide company gave the development state that exceeds accurate production technology 1962 first exceed accurate lathe. In American energy department support falls, LLI lab and Y, 12 factories cooperate, go out with successfully development large exceed accurate diamond lathe (DTM, 3 model) . This machine tool can machine 2100mm of ￠ of the biggest diameter, multichannel laser interference measures systematic resolution for 2.

5nm. 1984, LLL lab develops a lathe of LODTM large diamond successfully. The biggest diameter that this machine tool can machine is ￠ 1625mmx500mm, weight 1360kg. Adoption double frequency laser measures systematic resolution for 0.

7nm, precision of static state of its main shaft is: 25nm of radial and jumpy ≤ , axial change moves ≤ 51nm. LLL lab these two machine tools are the level on accepted international is at present top exceed accurate machine tool. The Nanocenter that CUPE(CranfieldUnitforPrecisionEngineering) develops exceeds accurate lathe already batch production, 50nm of ≤ of precision of its main shaft, the ≤ of face form precision that processes work 0.

1 μ M. Taylor company annex after Pneumo company, batch produces Nanoform250 to exceed accurate lathe, the product held international superprecision market of very major application, it is the product with lead technology. After entering 90 age, super- accurate mill is ground and polishing technology develops eagerly in a few developed countries, individual lab can reach very high level, the pay the metric system that includes among them especially makes a technology, get very great attention. Development exceeds accurate mill to grind the company with make a technology better with accept rice polish and orgnaization to have: PHILIP of the NACHI of the ZEISS of the TAYL0R of American M00RE company, England, Germany, LOH, SCHNEIDER, Japan, TOSHIBA, Dutch. Home has a lot of units be engaged in research and manufacturing superprecision equipment and instrument, be like: University of traffic of university of university of institute of Beijing machine tool, Tsinghua, science and technology of Changsha national defence, Harbin Institute of Technology, Xi'an, 303 wait for an unit. R>Institute of &n Beijing machine tool produces exceeding characteristic of accurate machine tool is: Main shaft performance is good, precision can achieve 20-50nm, stiffness can achieve 350N/ μ M; Smooth board linearity ≤ 0.

1 μ M/200mm; Add workpiece surface surface roughness the value is little, car mill surface is best and OK be less than 1nm; Athletic system resolution is high, can reach accept rice level; Commercial rate is high. Machine tool type includes: JCS, 027 exceed accurate lathe, NAM, 800 exceed accurate lathe, SQUARE300 to exceed accurate milling machine and SPHERE200 to exceed machine tool of accurate and spherical treatment to wait. Harbin Institute of Technology develops exceed model of accurate machine tool to be HCM, 50nm of ≤ of main shaft precision, m of μ of radial stiffness 220N/ , m of μ of axial stiffness 160N/ , slideway Z to (main shaft) linearity ≤ 0.

2 μ M/100mm, x to (tool carrier) linearity ≤ 0.

2 μ M/100mm, x, Z to verticality ≤ 1" , precision of face of shape of treatment workpiece precision (circularity) ≤ 0.

1 μ M. Exceed accurate production technology to will develop along 3 direction: (1) falls in the demand of sophisticated technology and product, develop new treatment mechanism, enter accept rice class and Yanami class machines precision. (2) is below national economy progress and the requirement that people living standard raises, enter national economy to stand for war, increase economic actual strength of the country. If the car is made, network of the computer, communication, CD, electric home appliances1, of 10nm of ≤ of 5nm, Ra exceed accurate cutting process. Here cutting position falls, cutting tool and be cut cutting parameter feature is measure of atom, element. Accordingly, change of the is not even system energy changeover that accept rice class exceeds the research of accurate cutting process to involve material to comprise, structure, element is kinetic with thermodynamic process, and be in nonlinear the machining process below condition. 2. 1. 1 element is kinetic model element is kinetic emulated fundamental is to build system of a particle to undertake emulation to the microphenomenon that studies, the between each element interaction basis in the system quanta is mechanical will decide. The element is kinetic emulated core problem is computation the mechanical function of relevant particle, its are like T basically suppose: (The motion of all 1) particle abides by classical Newton mechanical rule; (The interaction between 2) particle satisfies overlay principle. The element is kinetic the model is shown 1 times like the graph. Graph 1 element is kinetic the physical system that the model is N to particle number, its are mechanical the form can write descriptive Hamidu to case for Hamidu the amount is type (1) , (in 3) , qi, Pi is I respectively the broad sense coordinate of particle and momentum, mi is the quality of this particle, u is function of total potential energy. The Newtonian equation form of mechanical description is this system type (4) , (in 5) , fi is I the join forces that particle place gets; Ri is the positional coordinate of this particle. In the element kinetic in emulating, the option of situation function is very important, it decided the similar rate of computational workload and computational model and true system. Should consider the element choice such as mutual influence and quanta effect is corresponding situation function between multivalent key at the same time in the light of different material in computation. 2. 1. 2 be based on a wrong theory with kinetic element to be based on a wrong theory with kinetic element to analyse to announce the essence of all sorts of phenomena in crystal provided effective means, the fault is atomic essentially a kind of special configuration, its form a reason more complex. According to the research of wrong theory makes clear, wrong motion and interact are to form rupture the main reason of the source. The main mechanism that forms a fault is as follows: (1) bad stuff accumulates theory by Siteluo (Stroh) puts forward, it is to point to a fault accumulating of a place of strategic importance causes stress concentration, form source of crackle of similar wedge shape finally, increase wedge thick till form crackle. (2) poor response is academic this is Cottrell basis poor response rule puts forward an energy to use up smaller crackle nucleate model. A fault of the motion in the slide surface that this theory puts forward to intersect in two along cross a line confluent and a poor response that forms crackle mechanism. (3) Teng Tian theory of wrong destroy by melting or burning is on two slide surface, the blade that has two different signs wrong, opposite displacement happens below shear stress action, when ＜ of span of two slide surface when 10 atomic span, they form crackle with respect to amalgamative destroy by melting or burning. (4) snail snail of wrong crackle mechanism the fault gets cutting rank, cut rank generation hole, hole development makes crackle core. Kinetic model mixes the element the research of a wrong theory makes clear, if only from rupture mechanism research, in exceeding accurate cutting its rupture the exterior form appearance that the level is molecular volume level. If press average data, its rupture the level is thick about 0.

01-1nm. Consequently, in exterior surface roughness Ra is 10nm amount class in exceeding accurate cutting, its rupture level quality does not take main factor to adding workpiece surface quality to affect. But, had entered stage of accept rice amount in superprecision hind, it became main influencing factor. 2. The research of influencing factor of 2 surfaces quality is in in exceeding accurate cutting to machine, the factor that affects treatment surface quality is very much, the cutting performance that adds material, main shaft is athletic precision, smooth board athletic precision, from brace up wait with vibration isolation, cutting tool and parameter of cooling, cutting and ambient conditions. These elements are affecting the treatment process of workpiece with its complex rule namely, the rule of these elements all also has the quality of minute of form. If exterior surface roughness is gather B, the influencing factor of other is subclass A1, a2, a3, a4.

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(I ＝ L, 2, 3, .

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) . Criterion A1, a2, a3, a4.

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Ai is contained in gather B to machining the influence of exterior surface roughness to wait. From type (6) is knowable, the influence extent of Ai each element can undertake analysis and processing by cent form rule. Quality of surface of superprecision of accept rice class is concerned with a lot of elements, the cent form character of its surface parameter also is mixed the cent form character of each element rule is concerned. No matter be mixed from be mixed and the angle analysis of collect, in machining a process relevant each element all will affect final treatment surface quality with different level. If be and collect, dimension of NlJ surface cent and dimension of each element cent abide by next type: If belong to be mixed, abide by next type: The requirement that exterior surface roughness raises is its cent dimension reduce, reducing exterior surface roughness to divide the main measure of dimension is the cent dimension that reduces the component with minute of high dimension. The basis divides the discussion of form theory, from type (6) , (7) is knowable, aggregate divides dimension to won't be more than the biggest cent dimension in subclass. Actual condition also is such, lathe of high accuracy numerical control and the place that exceed accurate lathe to differ are uses lathe bed different, smooth board foundation is different, different. Exceeding what accurate lathe uses is high accuracy is decreased brace up lathe bed of foundation, marble is amiable style is quiet pressure smooth board, oscillatory attenuation is very so big, exterior treatment quality is high. What high accuracy lathe uses is cast-iron lathe bed, sliding slideway sneaks away board, end adds foundation to decrease brace up processing, cent dimension is so big. Dividing form theory is right nonlinear a kind of of complex system analysis method that approachs authenticity quite, especially the to micromechanism analysis result that its do not rely on diagnostic dimension, to analysing treatment mechanism has important sense. To be being machined the surface knits ridge chastity second man gave out exterior surface roughness and the academic formula that distribute dimension relation, in there is type of Rq ～ Wr-(2-D)(8) below certain condition: Rq is deviation of root mean square of exterior surface roughness, wr is spent to measure foot. By type (8) is knowable, rq of deviation of root mean square of exterior surface roughness is as measure measure (or measure resolution) of Wr change and change, it is one builds the opposite volume that measuring resolution foundation to go up. And cent dimension D is to become independent to come at resolution of token surface character, it is depict is reached by the elaborate structure of treatment surface its are complex of degree. In identical measurement resolution condition falls, cent dimension D is smaller, criterion Rq of deviation of root mean square of exterior surface roughness is smaller also. D of exterior cent dimension must come by the cent dimension combined influence of each subclass. Accordingly, raising the core that machines exterior quality is the cent dimension that reduces each subclass. We notice in the experiment, use minute of form theory analysis and processing to compare press close to to complex structure and imperceptible structure actual condition, and classic to having the element of law of one established rule or practice to still be accorded with mechanical theory. Accordingly, in actual assaying, to complex structure and imperceptible structure, use be based on an element kinetic while with cent form theory undertakes an analysis, still want to notice the application of classic theory. 3, mass of epilogue superprecision surface is formed by a variety of element influences, d of exterior cent dimension must come by the cent dimension combined influence of each subclass, accordingly, raising the core that machines exterior quality is the cent dimension that reduces each subclass. Higher oscillatory rule jumps over cent dimension complex, its are imperceptible the structure is more complex, bigger to influence of quality of surface of superprecision of accept rice class. CNC Milling